Journal Article

IMPULSE-2017-00170

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png GISAXS and GISANS as metrology technique for understanding the 3D morphology of block copolymer thin films

Müller-Buschbaum, P. (Corresponding author)MLZ*

2016
Elsevier New York, NY [u.a.]

Please use a persistent id in citations: doi:10.1016/j.eurpolymj.2016.04.007

Abstract: Grazing incidence small angle X-ray scattering (GISAXS) and grazing incidence small angle neutron scattering (GISANS) have developed as advanced thin film characterization methods, which enables the detection of the three-dimensional (3D) film morphology. In particular thin block copolymer films have been successfully probed with GISAXS and GISANS. Accessing the 3D morphology and understanding the 3D defects in block copolymer thin films used to pattern surfaces makes both, GISAXS and GISANS, interesting as metrology techniques. Since block copolymer films show a great promise in terms of enabling sub-10 nm patterns dimension formation for high volume integrated circuit manufacturing, a metrology to measure and quantify dimensions and defects is essential. Within this feature article selected examples of GISAXS and GISANS investigations probing the morphology of block copolymer films are presented, after a general introduction to the GISAXS and GISANS methods.

Keyword(s): Basic research (1st) ; Soft Condensed Matter (2nd)

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Contributing Institute(s):

1. E13

Experiment(s):

1. REFSANS: Horizontal TOF Reflectometer with GISANS option (NL2b)

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Database coverage:
; Current Contents - Physical, Chemical and Earth Sciences ; Ebsco Academic Search ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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