Propagation of threading dislocations in heteroepitaxial diamond films with (111) orientation and their role in the formation of intrinsic stress

Gallheber, B.-C.; Fischer, M.; Klein, O.; Schreck, M.

doi:10.1063/1.4985174

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Propagation of threading dislocations in heteroepitaxial diamond films with (111) orientation and their role in the formation of intrinsic stress - IMPULSE-2018-00130

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