Bachelor Thesis IMPULSE-2015-00143

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Inbetriebnahme und Parametrisierung einer Sputteranlage in der Kernbrennstoffentwicklung



2014

83 pp. () = Bachelorarbeit, Technische Universitaet Muenchen, 2014

Abstract: In the context of the development of high density uranium-molybdenum nuclear fuel (hereinafter referred to as U-Mofuel) at the Forschungs-Neutronenquelle HeinzMaier-Leibnitz (FRM II), the prevention of the formation of interdiffusion layers between the U-Mo fuel and the aluminum cladding has become one major research focus. The phenomenonof interdiffusion can be avoided by inserting a thin barrier consisting of suitable materials. One method to apply these very thin layers is sputtering. Although being used widely in thin-film technology, little experience exists with these methods regarding the requirements of nuclear technology. Therefore, the construction of a flexible sputtering device was necessary in order to investigate a wide range of parameters such as the substrate temperature, a substrate bias voltage or the pressure of the process gas respectively. The present thesis will proof that the sputtering device meets the technical requirements. This includes ensuring a sufficient flow of cooling water through the different components and choosing a suitable medium for heat conduction between the target and the sputtering device itself. Furthermore a basic characterization will be carried out by determining theheat-power characteristic of the substrate holder, the pressure-ignition voltage characteristic of the sputtering device as wellas the burn up behavior of the target material. The knowledge of those parameters will on the one hand ensure a safe and secure normal operation of the sputtering device and will on the other hand be of help in influencing the growth of the layer on the substrate in a desired manner and thereby adjust the properties of the interdiffusion barrier as needed.

Keyword(s): Others (1st) ; Instrument and Method Development (2nd) ; Unveröffentlichte Hochschulschrift


Note: Bachelorarbeit, Technische Universitaet Muenchen, 2014

Contributing Institute(s):
  1. RPHYSICS (RPHYSICS)
  2. DOMUSER (DOMUSER)
  3. MATSCI (MATSCI)
  4. EDV (EDV)
Experiment(s):
  1. HEU-MEU: Brennstoffentwicklung

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Document types > Theses > Bachelor Theses
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Institute Collections > MATSCI
Institute Collections > EDV
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 Record created 2015-03-06, last modified 2019-09-28


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