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SUGAR
Silicon sUbstrates from an inteGrated Automated pRocess
| Coordinator | BOSCH REXROTH BV* ; FUNDACAO DA FACULDADE DE CIENCIAS DA UNIVERSIDADE DE LISBOA ; 4PICO ; FERRO GMBH ; DOW CORNING EUROPE SA ; FERRO (HOLLAND) BV ; FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. ; INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM ; SEMILAB FELVEZETO FIZIKAI LABORATORIUM RESZVENYTARSASAG ; APPLIED MATERIALS ITALIA SRL ; ASSOCIATION POUR LA RECHERCHE ET LE DEVELOPPEMENT DES METHODES ET PROCESSUS INDUSTRIELS |
| Grant period | 2010-10-01 - 2013-09-30 |
| Funding body | European Union |
| Call number | FP7-ENERGY-2010-1 |
| Grant number | 256752 |
| Identifier | G:(EU-Grant)256752 |
